In capacitive humidity sensors, the effect of humidity on the dielectric constant of a polymer or metal oxide material is measured. With calibration, these sensors have an accuracy of ±2% rH in the range 5–95% rH.
Capacitive sensors are robust against effects such as condensation and temporary high temperatures.
Capacitive humidity sensors are used on the WeatherSTEM stations. The actual component inside the instrumentation is pictured to the right.